10.24335/L24681
RoyaltyStat
Nonexclusive patent, know-how and copyrights license to market, distribute and sublicense the 'RAPID Virtual Stepper' software for simulation of photolithography and manipulating integrated circuit designs for the production of semiconductors, in object code to end users who are licensee's customers, for use in conjunction with licensee's reticle equipment, with a printable coefficient module, a two dimensional image module, and a process window module.
RoyaltyStat
1998